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Continuous atmospheric pressure CVD equipment Product List

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Continuous Atmospheric Pressure CVD System for solar cell mass production (AMAX1000S)

Continuous Atmospheric Pressure CVD System for solar cell mass production (AMAX1000S)

For mass production of crystalline Si solar cells/For NSG(SiO2)/PSG/BSG deposition High productivity/Continuous atmospheric pressure CVD (APCVD) system

AMAX1000S is a continuous atmospheric pressure CVD system (APCVD system) developed for solar cell products based on the achievements of the "AMAX" series. 【Features】 　・Compatible with 156 mm square/125 mm square wafers 　・High productivity of 1500 wafers per hour 　・Compatible with thin wafers for solar cells 【Applications】 　・Hard mask for diffusion/ion implantation, Sacrificial deposition (NSG) 　・Passivation deposition (protective deposition, insulating deposition) (NSG) 　・Source deposition for solid phase diffusion (BSG, PSG)/Cap deposition (NSG) *For more details, please contact us or download the catalog to view.

  • CVD Equipment
  • Continuous atmospheric pressure CVD equipment

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Mass production continuous atmospheric pressure CVD equipment 'A6300S'

Mass production continuous atmospheric pressure CVD equipment 'A6300S'

Adopting SiC trays! A system that enables mass production while keeping costs down.

The "A6300S" is a continuous atmospheric CVD system for mass production that supports small-diameter wafers with a throughput of 120 wafers per hour. Equipped with an automatic tray exchange system and a head lifting mechanism, it reduces maintenance time and extends production time, while also considering the mass production needs of customers and the safety of operators. 【Features】 ■ High productivity: Capable of processing 120 wafers per hour ■ Heavy metal contamination countermeasures: Prevents metal contamination from the backside of the wafer ■ High performance: Adopts the A63 type head to achieve good film thickness distribution ■ Improved maintainability: Allows for safe maintenance in a short time ■ Footprint: Successfully minimized the number of trays to reduce the equipment area ■ Safety: Ensures high safety through interlocks and optimization of equipment mechanisms *For more details, please refer to the PDF document or feel free to contact us.

  • CVD Equipment
  • Continuous atmospheric pressure CVD equipment

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